JPH06744Y2 - コンデンサマイクロフォン型差圧検出器 - Google Patents
コンデンサマイクロフォン型差圧検出器Info
- Publication number
- JPH06744Y2 JPH06744Y2 JP1987162355U JP16235587U JPH06744Y2 JP H06744 Y2 JPH06744 Y2 JP H06744Y2 JP 1987162355 U JP1987162355 U JP 1987162355U JP 16235587 U JP16235587 U JP 16235587U JP H06744 Y2 JPH06744 Y2 JP H06744Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- differential pressure
- movable
- condenser microphone
- pressure detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 35
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 6
- 239000003990 capacitor Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 11
- 238000005259 measurement Methods 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162355U JPH06744Y2 (ja) | 1987-10-22 | 1987-10-22 | コンデンサマイクロフォン型差圧検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162355U JPH06744Y2 (ja) | 1987-10-22 | 1987-10-22 | コンデンサマイクロフォン型差圧検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0166047U JPH0166047U (en]) | 1989-04-27 |
| JPH06744Y2 true JPH06744Y2 (ja) | 1994-01-05 |
Family
ID=31446103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162355U Expired - Lifetime JPH06744Y2 (ja) | 1987-10-22 | 1987-10-22 | コンデンサマイクロフォン型差圧検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06744Y2 (en]) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6037837U (ja) * | 1983-08-20 | 1985-03-15 | トキコ株式会社 | ダイアフラム式センサ |
-
1987
- 1987-10-22 JP JP1987162355U patent/JPH06744Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0166047U (en]) | 1989-04-27 |
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